ASTM F1260-1989 评定电迁移平均失效时间和集成电路金属喷镀σ值的测试方法

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【英文标准名称】:TestMethodforEstimatingElectromigrationMedianTime-To-FailureandSigmaofIntegratedCircuitMetallizations
【原文标准名称】:评定电迁移平均失效时间和集成电路金属喷镀σ值的测试方法
【标准号】:ASTMF1260-1989
【标准状态】:作废
【国别】:
【发布日期】:1989
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F30.01
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:试验;应力;失效率;微电子学;喷镀金属
【英文主题词】:Acceleratedaging/testing-semiconductors;Ambientstresstemperature;Current-densitystress;Defects-semiconductors;Electricalconductors-semiconductors;Electromigration;Failureendpoint-electroniccomponents/devices;Integratedcircuits;Met
【摘要】:1.1Thistestmethodisdesignedtocharacterizethefailuredistributionofinterconnectmetallizationssuchasareusedinmicroelectroniccircuitsanddevicesthatfailduetoelectromigrationunderspecifiedd-ccurrent-densityandtemperaturestress.Thistestmethodisintendedtobeusedonlywhenthefailuredistributioncanbedescribedbyalog-Normaldistribution.1.2Thistestmethodisintendedforuseasarefereemethodbetweenlaboratoriesandforcomparingmetallizationalloysandmetallizationspreparedindifferentways.Itisnotintendedforqualifyingvendorsorfordeterminingtheuse-lifeofametallization.1.3Thetestmethodisanacceleratedstresstestoffour-terminalstructures(seeGuideF1259)wherethefailurecriterioniseitheranopencircuitinthetestlineoraprescribedpercentincreaseintheresistanceoftheteststructure.1.4Thistestmethodallowstheteststructuresofatestchiptobestressedwhilestillpartofthewafer(oraportionthereof)orwhilebondedtoapackageandelectricallyaccessibleviapackageterminals.1.5Thistestmethodisnotdesignedtocharacterizethemetallizationforfailuremodesinvolvingshortcircuitsbetweenadjacentmetallizationlinesorbetweentwolevelsofmetallization.1.6Thistestmethodisnotintendedforthecasewherethestresstestisterminatedbeforeallpartshavefailed.1.7Thisstandardmayinvolvehazardousmaterials,operations,andequipment.Thisstandarddoesnotpurporttoaddressallofthesafetyproblemsassociatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:L55
【国际标准分类号】:31_200
【页数】:7P.;A4
【正文语种】: